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Chip checking microscope TG2U

Quantity:
TG2U lithography is used in the LSI, sensor, surface wave component, magnetic bubble, microwave, CCD and so on.

 Introduction】:
 TG2U lithography is used in the LSI, sensor, surface wave component, magnetic bubble, microwave, CCD and so on.

 Remark】:
 Lithography TG2U Technical parameter:
 1.Template size:
 a.100×100×2-3mm;
 b.75×75×2-3mm:
 2. silicon size:Φ50-Φ75mm, real line width 3-4цm;
 3. comparative displacement between template and silicon:
 a.X、Y ≥±2.5mm;
 b.θ(rotate)≥±5°;
 4.support station (silicon) rotate Z axies: rough tuning 360°,fine tuning ±5;
 5.Integrated moving range of working station:X、Y integrate Φ75mm;
 6. the space between ball basical station and template:0-7mm;
 7. exposure system:GCQ200W over high-pressure ball Hg, exposure wave length:300~436nm;
 8.engergy is not less than 407nm of wave length;7mw/cm;
 9. uneven is within Φ75mm :±5%:
 10. lighting wave length:≈545nm;
 11. exposure time:O.01 seconds-99.99 minutes;
 12. the focusing range of binocular:13mm;
 13. the zoom of binocular :
 a. pair ocular:lOX,16X;
 b. flat field objective:6X,9X,15X;
 c. total zoom out:60X-240X;
 14. vacuum touching pressure:≥O.7Kgf;
 15. power supply:
 a.frequency:50HZ(Z);
 b.rotated input voltage:190V-230V;
 c.power consumption:≤300VA;
 16.Dimension:1000X850X980mm(2 boxes)
 17.Weight:≈200Kg;
 (1) vacuum supply:≥450mm Hg;
 (2) The device of air supply stability is below
 Add: If the user had any special request, please contact with us.

Beijing Torch Co.,Ltd

  • Add:Star City International Mansion A-6D,jiuxianqiao A NO.10,Chaoyang District,Beijing China 
    Zip/Post Code:100016 
    Tel:086-010-60509015-890,889,892 
    Fax:0086-010-51662451-8001 

    Mail:smt@torch.cc 

TERMWAY CHINA

Beijing Factory:NO.15 Bulding,lianDong U Valley Industrial Park,Tongzhou District,Beijing,China 
Tel:400-688-1964 
E-mail:bj@termway.com 

RICHARD ZHAO

GM BEIJING TORCH SMT CO,.LTD 
BEI JING TORCH CO,LTD

Beijing Institute Of Fashion Technology 

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