The VH Series High-Vacuum Sealing and Soldering Furnace is a professional high-vacuum sealing and soldering furnace designed for getter thermal activation. The VH Series adopts
upper and lower infrared heating, and is equipped with a process atmosphere environment with controllable nitrogen and formic acid, enabling operation under high-vacuum oratmospheric conditions. It can simultaneously complete high-temperature activation of getters and low-temperature soldering of workpieces. The equipment features hightemperature control accuracy and stable process, achieving low void rate and high air tightness of devices after soldering. The machine chamber adopts water cooling to ensure reliability during long-term operation.
The VH Series High-Vacuum Sealing and Welding Furnace is a professional high-vacuum sealing and welding furnace designed for getter thermal activation. The VH Series adopts upper and lower infrared heating, and is equipped with a process atmosphere environment with controllable nitrogen and formic acid, enabling operation under high-vacuum or atmospheric conditions. It can simultaneously complete high-temperature activation of getters and low-temperature welding of workpieces. The equipment features high temperature control accuracy and stable process, achieving low void rate and high air tightness of devices after welding. The equipment shell adopts water cooling to ensure reliability during long-term operation.
When the equipment in this series performs getter high-temperature thermal activation at 450℃, its heat insulation capacity can reach over 300℃. It enables both getter high-temperature thermal activation and low-temperature welding of workpieces simultaneously inside a single unit.
The vacuum level of this series of equipment can reach up to 10 Pa.
This series of equipment is suitable for high-vacuum packaging and welding of atomic clocks, PGA (Plastic Grid Array) ceramic-packaged infrared chips (with similar package sizes from 55mm to 4545mm), hemispherical inertial navigation gyros, gyroscopes, MEMS, and other components.
The VH5 model offers the optional Top Heating function, which enables the thermal activation process of getters on the top of workpieces.
Error-proofing function: The equipment connects to the MES system to automatically read IDs, preventing material mismatch.
Core Process Poka-Yoke Function: When the equipment starts, it automatically compares the equipment's key parameters with the process parameters stored in the MES server, and welding can only proceed if there is no discrepancy. Meanwhile, during the process, according to customer requirements, it can be set to collect core process parameters and compare them with the set process parameters at regular intervals; if the deviation exceeds the threshold, it will automatically alarm and prompt manual intervention.
The equipment is equipped with a data acquisition function.
The equipment can seamlessly integrate with the MES system.
【Standard Equipment】
1、One set of Getter Thermal Activation Vacuum
Sealing and Welding Furnace (main unit)
2、One water chiller
3、One dry vacuum pump
4、One turbomolecular pump
【Optional Equipment】
1、Top Heating (Suitable for welding
products with large-size jigs)
2、Ion Pump
