Home » Products » Semiconduct equipments » Getter Thermal Activation High -Vacuum Sealing and Soldering Furnace ⸺VH5

Product Category

Getter Thermal Activation High -Vacuum Sealing and Soldering Furnace ⸺VH5


Quantity:



Inquire Add to Basket

Model:
Getter Thermal Activation High -Vacuum Sealing and Soldering Furnace ⸺VH5

Product Description

The VH Series High-Vacuum Sealing and Soldering Furnace is a professional high-vacuum sealing and soldering furnace designed for getter thermal activation. The VH Series adoptsupper and lower infrared heating, and is equipped with a process atmosphere environment with controllable nitrogen and formic acid, enabling operation under high-vacuum oratmospheric conditions. It can simultaneously complete high-temperature activation of getters and low-temperature soldering of workpieces. The equipment features hightemperature control accuracy and stable process, achieving low void rate and high air tightness of devices after soldering. The machine chamber adopts water cooling to ensurereliability during long-term operation.

VH series high vacuum oven insulation capacity can reach over 300℃ when performs getter high-temperature thermal activation at 450℃. It enables both getter high-temperature thermal activationand low-temperature welding of workpieces simultaneously inside a single

The vacuum level of this series of equipment can reach up to 10-6Pa.

This series of equipment is suitable for high-vacuum packaging and soldering of atomic clocks, PGA (Similar package sizes 5 gyros, gyroscopes, MEMS, and other components. *5mm to 45*45mm) ceramic-packaged infrared chips,hemispherical inertial navigation gyros,gyros copes,mems,and other components

VH5 model offers the optional Top Heating function, which enables the thermal activation process of getters on the top of workpieces

Error-proofing function: The equipment connects to the MES system to automatically read IDs, preventing material mismatch

Core Process Poka-Yoke Function: When the equipment starts, it automatically compares the equipment's key parameters with the process parameters stored in the MES server, and soldering can only proceed if there is no discrepancy. Meanwhile, during the process, according to customer requirements, it can be set to collect core process parameters and compare them with the set process parameters at regular intervals;if the deviation exceeds the threshold,it will automatically alarm and prompt manual intervention

The equipment is equipped with a data acquisition function.

The equipment can seamlessly integrate with the MES system.

【Standard Equipment】

1、One set of Getter Thermal Activation Vacuum

2、

Sealing and Soldering Furnace (main body)

One water chiller

4、

3、One vacuum dry vacuum pump

One turbomolecular pump

Function introduction

Prduct Features